ESI is the industry leader in Gasonics L3510 Plasma Ashers remanufacturing services. ESI has been providing unique innovative upgrades, cost-effective technical solutions, high quality equipment worldwide since 1986. Supplying solutions for those who are faced obsolete OEM components  and parts that are no longer supported. Gasonics Asher equipment support applications such as Plasma Resist Strip, Downstream Plasma Strip, Plasma Strip, Plasma Descum, Resist Strip, and Plasma Surface Treatment.

Learn More

Robot, Gasonics L3510, Plasma Asher, Semiconductor


ESI provides unique system upgrades for Gasonics L3510 and L3500 Plasma Asher equipment. With IDX Flexware ESI can introduce features that improve yield, productivity, and performance in your OEM equipment. ESI provides newly remanufactured L3510 or L3500 equipment with multiple upgrade options that extend the life of your Gasonics Asher equipment.

Learn More

IDX Flexware, Gasonics, Asher, Wafer


ESI provides reliable support throughout the United States and globally. All upgrades and remanufacturing services come with a 1 yr. warranty. All systems that are remanufactured meet or exceed original OEM specifications. ESI provides professional installation, setup, and  onsite personnel  operational and software training.

Learn More

Gasonics, Plasma Asher, L3510, e3511, Single-wafer

European Support

S3 Alliance is our European distributor for ESI with local ESI support throughout Europe.

Visit S3 Alliance for more info.

Learn More